The High-Precision Phase Retarder is a critical optical component used in ellipsometers and film thickness measurement systems. It is designed to detect the thickness and phase variation of optical thin films, applied in semiconductor manufacturing and precision optical diagnostics.
Key Functions
1. Controls or adjusts the phase difference of incident light
2. Enables accurate phase modulation in ellipsometric measurements
3. Customizable phase delays available (e.g., λ/4, λ/2)
Application Areas
1. Ellipsometers
2. Thin film thickness measurement instruments
3. Semiconductor process control
4. Precision optical metrology systems
Tech Advantages
1. High precision in assembly
2. Excellent optical uniformity and stability
3. Applicable across UV, visible, and IR spectral ranges
4. Multiple birefringent crystal options available (e.g., Quartz, MgF₂)
